Direct-Write Nanostructuring with a Focused Electron Beam Operation of a Gas Injection Sytem for Focused Electron Beam System Deposition of Metals and Dielectrics with a Scanning Electron Microscope

01.01.2011 - 31.12.2014
Proprietary project

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Institute

Research focus

  • Special and Engineering Materials: 60%
  • Sensor Systems: 20%

Publications