Miniaturized MEOS

01.07.2010 - 30.06.2013
Research funding project
The aim of the two-year research project is the miniaturization of the optical microphone without membrane MEOS. In a preceding FFG research project (FFG B1 814318), the functional principle of the novel transducer was demonstrated by the consortium constituted by University of Technology (Photonics Institute) and NXP Semiconductors (Sound Solutions). In the current follow-up project (same consortium), the optical resonator being the core element of the sensor is miniaturized to a dimension of 1 mm by means of micromachining technologies.

People

Project leader

Project personnel

Institute

Grant funds

  • FFG - Österr. Forschungsförderungs- gesellschaft mbH (National) Austrian Research Promotion Agency (FFG)

Research focus

  • Photonics: 100%

Keywords

GermanEnglish
Akustik Acoustics
LasertechnologieLasertechnology
ElektroakustikElectroacoustics
VCSELVCSEL
MikrobearbeitungMicromachining

Publications