3D NanoChemiscope¿Combined SIMS-SFM Instrument for the 3-Dimensional Chemical Analysis of Nanostructures

01.09.2008 - 31.08.2012
Research funding project
The objective of this project is to develop an innovative and novel combination of a new TOF-SIMS with substantially improved lateral resolution and sensitivity, combined with a new metrological high resolution SFM. The two techniques provide complementary information on nanoscale surface chemistry and surface morphology. In combination with a layer by layer removal of material using low energy sputtering, quantitatively measured by SFM, this combined ultra-high vacuum (UHV) instrument will be unique for the 3-dimensional chemical characterisation of nanostructured inorganic as well as organic materials with down to at least 10 nm lateral resolution and down to 1 nm depth resolution. Joint by a novel software for the calculation and display of 3-dimensional distributions of all chemical species, this leads to a totally new ¿3D NanoChemiscope¿.

People

Project leader

Project personnel

Institute

Grant funds

  • European Commission (EU) FP7 I.4 COOPERATION Nano-sciences, Nano-technlogies, Materials and new Production Technologies 7.Rahmenprogramm für Forschung European Commission - Framework Programme European Commission Call identifier FP7-NMP-2007-SME-1 Application number 200613

Research focus

  • Surfaces and Interfaces: 50%
  • Materials Characterization: 50%

Keywords

GermanEnglish
TOF-SIMSTOF-SIMS
Nano-AnalytikNano-Analytik
SFMSFM

Publications