Kinetic lattice Monte Carlo studies of Smart Cut(TM) technology: development of models for point and extended defects in Si(001) after He and H co-implantation

01.01.2008 - 28.02.2009
Assigned research project
Kinetic lattice Monte Carlo studies of Smart Cut(TM) technology: development of models for point and extended defects in Si(001) after He and H co-implantation

People

Project leader

Project personnel

Institute

Contract/collaboration

  • S.O.I.T.E.C Silicon on Insulator Technologies

Research focus

  • Modeling and Simulation: 100%

Keywords

GermanEnglish
Ionenimplantationion implantation
Monte-Carlo-SimulationMonte Carlo simulation
Smart-Cut-TechnologieSmart Cut technology

Publications