Kinetic lattice Monte Carlo studies of Smart Cut(TM) technology: development of models for point and extended defects in Si(001) after He and H co-implantation

01.01.2008 - 28.02.2009
Auftragsforschungsprojekt
Kinetic lattice Monte Carlo studies of Smart Cut(TM) technology: development of models for point and extended defects in Si(001) after He and H co-implantation

Personen

Projektleiter_in

Projektmitarbeiter_innen

Institut

Contract/collaboration

  • S.O.I.T.E.C Silicon on Insulator Technologies

Forschungsschwerpunkte

  • Modeling and Simulation: 100%

Schlagwörter

DeutschEnglisch
Ionenimplantationion implantation
Monte-Carlo-SimulationMonte Carlo simulation
Smart-Cut-TechnologieSmart Cut technology

Publikationen