CZ :: Advanced direct-write Nanostructuring by Focused Electron Beam Induced Provessing (FEBIP)

12.06.2007 - 30.09.2009
Assigned research project

People

Project leader

Project personnel

Institute

Contract/collaboration

  • Carl Zeiss MTS GmbH

Research focus

  • Non-metallic Materials: 20%
  • Nano-electronics: 50%
  • Materials Characterization: 30%

Publications