Kinetic Monte Carlo studies of Smart Cut technology in Si; code modification and calibration of IMSIL for H and He implantations in GaN

01.11.2006 - 31.12.2007
Assigned research project
Kinetic Monte Carlo studies of Smart Cut technology in Si; modification of code IMSIL for non-diamond crystal structures; calibration of code IMSIL for H & He implants into GaN upon receiving of the SIMS profiles

People

Project leader

Project personnel

Institute

Contract/collaboration

  • S.O.I.T.E.C Silicon on Insulator Technologies

Research focus

  • Modeling and Simulation: 100%

Keywords

GermanEnglish
Monte-Carlo-SimulationMonte Carlo simulation
Smart-Cut-TechnologieSmart Cut technology
Ionenimplantationion implantation

Publications