OSS - ta-C wafe: Bestimmung des Eigenspannungszustandes mittels Wafer Curvature

01.12.2025 - 31.01.2026
Assigned research project

People

Project leader

Institute

Contract/collaboration

  • Oerlikon Surface Solutions AG Trübach, Zweigniederlassung Balzers Balzers Technology & Service Center

Research focus

  • Materials Characterization: 100%

Publications