362.149 Processing Chemistry for Micro- and Nanoelectronics Canceled
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023S, VU, 2.0h, 3.0EC, to be held in blocked form


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to..

.. apply basic principles of chemistry to the processes of microfabrication
... understand the chemical processes for etching, deposition, cleaning in process technology
... independently mix a buffered hydrofluoric acid acid from the individual components
... independently design processes for electrode deposition of copper layers (V, A, duration)
... select gas flows for dry processes according to the reaction stoichiometry
... to work on wet workbenches in the clean room with acids, alkalis and solvents


Subject of course



Chemical concepts (pH, electrochemistry, reaction mechanisms, ... and much more), thermodynamics, kinetics,
Microfabrication processes (lithography, RIE, CVD, ...), which are based on chemical processes.

Calculation examples for gas processes, etching processes, equilibrium reactions, etc.

Experimental exercise:
Safe handling of chemicals (acids, solvents, gases)

Teaching methods

Lecture supported with ppt slides and blackboard drawings

Application of chemical principles to everyday issues
Application of the chemical principles to questions of semiconductor technology
Joint development of chemical formulas and reaction equations
Common physico-chemical calculations

Mode of examination


Additional information

** ATTENTION Please register for LVA in TISS ***

Scheduling Meeting: 02.03.2020 - 15h - Sem 362-2

The lecture exercise “Process Chemistry” will be held as a BLOCK LECTURE in SS2020.
In SS2020, the lecture will be arranged as agreed at the preliminary meeting on March 2nd, 2020 from March 3rd. until 11.03. in the morning from 9 am to 1 pm.
The exact schedule will be determined in the planning session on March 2nd, 2020 together with all students present.
  Location:  NanoCenter - Building CH

                 Gusshausstrasse 25a
                 Seminar room 2nd floor

In SS2020

For the lecture: Please bring your pocket calculator!



Examination modalities

Participation in interactive lessons, pre-calculation of examples on the blackboard, repetition of lessons

Finally oral interview with bi to 3 calculation examples



Course registration

Begin End Deregistration end
30.01.2023 10:00 06.03.2023 18:00 05.06.2023 10:00

Registration modalities

TISS-Registration unlocks access to support material for this lecture


Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Not specified
066 508 Microelectronics and Photonics Not specified


No lecture notes are available.

Previous knowledge

Knowledge of Lithography, CVD, RIE

Preceding courses

Accompanying courses

Continuative courses


if required in English