362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2017W, VO, 2.0h, 3.0EC
Quinn ECTS survey


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture

Aim of course

Knowledge on key processes and technologies for the fabrication of modern Structures, Components and Devices for Nanoelectronics, Photonics and Microsystems.

Subject of course

Comprehensive knowledge of the processes and technologies that form the basis for modern nanoelectronics, nanophotonics and microsystems technology. Elemental and compound semiconductor of group IV and III-V and oxide ceramics are the focus on the material side.

Process technologies for the manufacture of micro- and nano-scale, 1-, 2- and 3-dimensional structures, components and devices. Primary concerns are the key processes including layer structure with photo- and electron beam lithography and etching techniques with RF plasma processes, selective growth processes for (quasi-) 1-, 2- dimensional structures such as nanodots and nanowires, and in-situ and ex-situ Characterization methods.

Additional information

LVA Termine

Di     03.10.2017 - 23.01.2018              13:45 - 15:15
Seminarraum 366-MST

Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik



Course dates

Tue13:45 - 15:1503.10.2017 - 23.01.2018Seminarraum 366-MST Process technology
Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik - Single appointments
No records found.

Examination modalities

Oral exam

Each lecturer can be chosen as examiner for the full lecture content- Register with the selected Examiner.

Examiner Wanzenboeck:
Registration for stated dates via TISS.
Additional exam dates maybe arranged upon request -
Contact alexandra.linster@tuwien.ac.at


DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Mon15:00 - 16:0015.04.2024Besprechungsraum 362 - 2 oral04.04.2024 14:00 - 12.04.2024 23:59TISSPrüfung Prozesstechnlogien
Mon15:00 - 16:0006.05.2024Besprechungsraum 362 - 2 oral16.04.2024 12:00 - 03.05.2024 23:59TISSPrüfung Prozesstechnologien
Mon15:00 - 16:0010.06.2024Besprechungsraum 362 - 2 oral16.04.2024 12:00 - 07.06.2024 23:59TISSPrüfung Prozesstechnologien
Mon15:00 - 16:0024.06.2024Besprechungsraum 362 - 2 oral16.04.2024 12:00 - 21.06.2024 23:59TISSPrüfung Prozesstechnologien

Course registration

Begin End Deregistration end
01.09.2017 09:00 02.02.2018 12:00


Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Mandatory
066 453 Biomedical Engineering Mandatory elective
066 504 Master programme Embedded Systems Mandatory1. Semester
066 508 Microelectronics and Photonics Mandatory1. Semester


No lecture notes are available.

Accompanying courses

Continuative courses


if required in English