Duration: 3-day lab course (other time schedule possible upon request) Start date: on individual appointment (also during holiday is possible)Group: max. 3 students Grades: based on lab reports
This hands-on lab course will give students the possibility to experience semiconductor fabrication and/or analysis techniques. This lab course is ideal to deepen the understanding of theoretical know-how gained in 362.144, 362.152, or 362.146.
Also ideal introductory course for physicists and chemists to gain first practical experience in clean-room techniques of microfabrication. (For the interested also extended project works 362.092 are offered).
Laboratory work on structuring and characterization techniques in semiconductor manufacturing
Work program of the Group LUGSTEIN
on request
Work program of the group WANZENBOECK
Processing techniques of research-related areas (optional): x) optical lithography and PVD metal deposition for cell culture microchip * x) direct writing of metal structures (Local CVD with a focused electron beam) * x) Topographic (AFM) and chemical (EDX) characterization of nanostructures * x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.) x) other topics available on request
LVA is carried out in 3 groups. There are several courses offered by appointment during the semester.
Registration required (preferably in groups of 2-3 students) by email to
to alois.lugstein@tuwien.ac.at
or heinz.wanzenboeck@tuwien.ac.at
New in summer term 2018; TISS registration for courses by Prof. Wanzenboeck required!Course content: optical lithography, sputter deposition, dry etchingBasic knowledge of processing technology is a precondition.please register by TISSAttention: course dates may change in case of unexpected events.Questions: Please contact our team assistance Alexandra.Linster@tuwien.ac.at
Lab report
Registration for this course (ideally as groupe) per email to:
alois.lugstein@tuwien.ac.at or
heinz.wanzenboeck@tuwien.ac.at
Registration email with Header "Anmeldung 362.084 Labor Mikroelektronik"+ you names, your student IDs, suggesteed start dafe
Recommended in combination with362.144 VO Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik362.152 VU Materialien, Prozesse und Technologien der Mikroelektronik362.146 VU Prozesschemie für Mikro- und Nanoelektronik