Graphene as MLM capping layer

01.01.2010 - 31.12.2011
Auftragsforschungsprojekt
OVERVIEW: In the proposed work, we will investigate the properties of graphene (a single atomic layer of graphite) as a potential primary or secondary MLM capping layer. By primary, we mean that the graphene would be placed directly on the surface layer of a MLM. As a secondary cap, the graphene may be placed on a conventional MLM cap such as TiO2 or Ru. The objective is to investigate whether graphene will effectively passivate the surface with respect to carbon overlayer growth, and if it would suppress substrate oxidation in the presence of EUV radiation and hydrocarbon and oxidizing gases. Initial studies will focus on model single crystal metal systems. Later in the project period, we will grow graphene in a mode where it may be transferred to a desired substrate in large sheets, and then tested for adsorption and passivation effects.

Personen

Projektleiter_in

Projektmitarbeiter_innen

Institut

Contract/collaboration

  • Intel Corporation, Hillsboro, Oregon, USA

Forschungsschwerpunkte

  • Non-metallic Materials: 20%
  • Special and Engineering Materials: 20%
  • Surfaces and Interfaces: 60%

Schlagwörter

DeutschEnglisch
Oberflächenphysiksurface science
LithographieverfahrenLithography

Externe Partner_innen

  • Rutgers, The State Universtity of New Jersey

Publikationen