The aim of the project rollerNIL is to replicate of large area complex optical structures and biomimetic structure colors using role-based nanoimprint lithography. This will be investigated both by the production of nanoimprint masters, as well as research on an in-line capable process measurement technology. In order to understand the process supporting simulations are performed that allow to draw conclusions on the material and process requirements. Imprint materials must be adapted to the requirements.
The task of the Technical University of Vienna in this consortium project is the production of three-dimensional stamps employing a Focused Ion Beam System for either direct milling or for Ga-implantation and subsequent RIE etching.
