Kinetic Monte Carlo studies of Smart Cut technology in Si; code modification and calibration of IMSIL for H and He implantations in GaN

01.11.2006 - 31.12.2007
Auftragsforschungsprojekt
Kinetic Monte Carlo studies of Smart Cut technology in Si; modification of code IMSIL for non-diamond crystal structures; calibration of code IMSIL for H & He implants into GaN upon receiving of the SIMS profiles

Personen

Projektleiter_in

Projektmitarbeiter_innen

Institut

Contract/collaboration

  • S.O.I.T.E.C Silicon on Insulator Technologies

Forschungsschwerpunkte

  • Modeling and Simulation: 100%

Schlagwörter

DeutschEnglisch
Monte-Carlo-SimulationMonte Carlo simulation
Smart-Cut-TechnologieSmart Cut technology
Ionenimplantationion implantation

Publikationen