Focused Ion Beam Simulation

01.03.2007 - 30.06.2011
Assigned research project
Two programs for the simulation of material changes due to focused ion beam bombardment, which have been developed at the institute, will be enhanced: AMADEUS is based on a continuum approach and will get a user interface. FIBSIM is a Monte Carlo simulator and will be improved with respect to its accuracy. Moreover, a student will visit the client and will perform experiments in order to verify simulations. Finally, the two programs will be compared with the goal of establishing recommendations of use.

People

Project leader

Project personnel

Institute

Contract/collaboration

  • FEI Company

Research focus

  • Special and Engineering Materials: 10%
  • Quantum Modeling and Simulation: 10%
  • Nano-electronics: 10%
  • Mathematical and Algorithmic Foundations: 10%
  • Modeling and Simulation: 60%

Keywords

GermanEnglish
Fokussierte Ionenstrahlenfocused ion beam
Simulationsimulation

Publications