Computational modeling for wet cleaning inside semiconductor nanostructures

01.02.2022 - 31.01.2025
Research funding project

People

Project leader

Sub project leader

Institute

Grant funds

  • FFG - Österr. Forschungsförderungs- gesellschaft mbH (National) Programme COMET-Centers (K1) Programme COMET Austrian Research Promotion Agency (FFG)

Research focus

  • Computational Fluid Dynamics: 70%
  • Surfaces and Interfaces: 30%

External partner

  • TU Graz
  • Lam Research AG
  • CEST Kompetenzzentrum für elektrochemische Oberflächentechnol

Publications