Air Pressure Control of a Clean Room Facility

02.02.2008 - 28.02.2009
Assigned research project
In industrial clean room facilities a defined over-pressure relative to atmospheric pressure is required. This over-pressure within an assembly of rooms is ensured by several locally controlled ventilation systems. Due to sensor offsets and varying leakages pressure surges can occur during the openening and closing of connecting doors. In this project those pressure surges are modelled by a physical simulation model which is also utilized for design and validation of a control concept. This concept should be based on the existing control scheme, and it should be simple and easy to implement.

People

Project leader

Institute

Contract/collaboration

  • Baxter AG

Keywords

GermanEnglish
Luftdruck-Regelungair pressure control
Reinraumanlageclean room facilities
Modellbildungmodeling

Publications