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Senior Scientist Dipl.-Ing. Dr.techn.
Johannes Schalko
Phone
+43 1 58801 36687
E-Mail
johannes.schalko@tuwien.ac.at
Assigned
E366-50
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Publications:
Publications
Keywords
Keyword (German)
Keyword (English)
PECVD (plasma enhanced chemical vapor deposition)
PECVD
Harte Kohlenstoffschichten
hard carbon films
Mikrosensoren
integrated sensors
MEMS (micro electro mechanical systems)
MEMS
Dünnschichttechnologie
thin film technology
Plasmatechnologie
Area of expertise according to Statistik Austria
Code
Area of expertise (German)
Area of expertise (English)
2238
Mikromechanik (auch: - der Werkstoffe)
Micromechanics (also: of materials)
2521
Mikroelektronik
Microelectronics
2546
Sensorik
Sensor technology
1221
Technische Physik
Technical physics