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376.053 Optical Metrology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022S, VU, 3.0h, 4.5EC, to be held in blocked form

Properties

  • Semester hours: 3.0
  • Credits: 4.5
  • Type: VU Lecture and Exercise
  • Format: Distance Learning

Learning outcomes

After successful completion of the course, students are able to categorize optical metrology systems for the target physical quantity and choose a proper system based on requirements of the target application. For that, students are able to distinguish physical values measured by optics such as radiometry and photometry, and draw the structure and operation principle of basic optical components (laser, photodiodes, CCD, ...). Based on the physics and the basic components for optical metrology, students are able to design a complete optical metrology system such as laser Doppler Vibrometer, speckle interferometry, and lidar, explain the benefits and drawback of each optical metrology system, and justify the choice of the tool in various application examples.

After successful completion of the lab classes, student are able to build optical measurement systems (Michelson interferometry) from the basic optical components on an optical breadboard and calculated the target physical quantity from the measured data. In addition, students are able to operates the advanced optical metrology systems (laser Doppler Vibrometer, Thermal camera, wavefront sensor, and lidar) and demonstrate its advantages and limitations in various applications.

Michelson Interferometer wavefront sensor

Subject of course

Fundamentals of Measurement
Concept, SI units, uncertainty

Introduction to Optical Metrology
optical radiation, light, EM wave, spectrum

Detecting optical radiation
Radiometric and photometric quantities

Optical radiation as EM wave
Description, characteristics, polarization, light/matter interaction, dispersion, refraction, reflection, transmission

Radiation sources and optical radiation
Natural sources of radiation, thermal radiation

Optical temperature measurement
Pyrometers, thermal imaging

Laser
Properties, setup, types of lasers, Gaussian beam, coherence

Interferometer
Michelson, Mach-Zehnder and Sagnac interferometer Coherence-tomography

Semiconductor light sources and semiconductor laser
Detectors
Photoelectric effect, photoelectric cell and photomultiplier, semiconductor detectors (diodes, PSD, CCD and CMOS), thermal detectors (QWIP, thermopile, bolometer, pyro-electric)

Speckle metrology and holography
Properties of laser speckle interferometer, speckle correlation, holographic interferometry

Optical flow measurement
Optical Doppler effect, Laser Doppler Anemometer, Particle Dynamics Analysis, Particle Image Velocimetry, Vibrometer, Schlieren optics

Light Detection and Ranging (LIDAR) 
Optical Ranging Principle, Reflection from Materials, SNR and performance, Scanning and Nonscanning LIDAR

Wavefront Sensing (WFS)
Diffraction Imaging, Principle, Aberration, Measurements

* The 4 days lab exercises are organized with two groups. Students will be asigned on either group A or B.


Teaching methods

The lecture is given as presentation to explain the fundamental physics for optical metrology, basic components of optical metrology, and various optical metrology tools.  For further experience of optical metrology tools, lab classes follow after the lectures.

Mode of examination

Immanent

Additional information

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to complete the module, also the lecture 376.052 Nanometrology has to be visited.

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Fri09:00 - 13:0029.04.2022 - 06.05.2022 ACIN Besprechungsraum, (CA 05 32)Lecture
Fri09:00 - 13:0013.05.2022 - 03.06.2022Computerlabor E376, CA0426 Lecture
Fri14:00 - 17:0013.05.2022 - 10.06.2022Messtechnik Labor Exercise
Fri11:00 - 13:0010.06.2022Computerlabor E376, CA0426 Lecture
Mon13:00 - 14:3013.06.2022Computerlabor E376, CA0426 Lecture
Optical Metrology - Single appointments
DayDateTimeLocationDescription
Fri29.04.202209:00 - 13:00 ACIN Besprechungsraum, (CA 05 32)Lecture
Fri06.05.202209:00 - 13:00 ACIN Besprechungsraum, (CA 05 32)Lecture
Fri13.05.202209:00 - 13:00Computerlabor E376, CA0426 Lecture
Fri13.05.202214:00 - 17:00Messtechnik Labor Exercise
Fri20.05.202209:00 - 13:00Computerlabor E376, CA0426 Lecture
Fri20.05.202214:00 - 17:00Messtechnik Labor Exercise
Fri03.06.202209:00 - 13:00Computerlabor E376, CA0426 Lecture
Fri03.06.202214:00 - 17:00Messtechnik Labor Exercise
Fri10.06.202211:00 - 13:00Computerlabor E376, CA0426 Lecture
Fri10.06.202214:00 - 17:00Messtechnik Labor Exercise
Mon13.06.202213:00 - 14:30Computerlabor E376, CA0426 Lecture
Course is held blocked

Examination modalities

Submission of a lab report, a written exam about the course materials (an oral exam instated upon request)

Exams

DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Wed14:00 - 16:3014.06.2023Computerlabor E376, CA0426 written02.06.2023 20:00 - 13.06.2023 23:59TISSFinal Exam
Mon10:00 - 12:3003.07.2023Computerlabor E376, CA0426 written02.06.2023 20:00 - 02.07.2023 23:59TISSFinal Exam
Thu10:00 - 10:3006.07.2023 ACIN Besprechungsraum, (CA 05 32)oral03.07.2023 16:30 - 04.07.2023 18:00TISSOral Exam

Course registration

Begin End Deregistration end
01.02.2022 00:00 06.06.2022 09:00 06.06.2022 09:00

Curricula

Literature

No lecture notes are available.

Previous knowledge

Basic knowledge in optics and electrodynamics

Accompanying courses

Miscellaneous

  • Attendance Required!

Language

English