376.053 Optical Metrology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021S, VU, 3.0h, 4.5EC, to be held in blocked form

Properties

  • Semester hours: 3.0
  • Credits: 4.5
  • Type: VU Lecture and Exercise
  • Format: Online

Learning outcomes

After successful completion of the course, students are able to categorize optical metrology systems for the target physical quantity and choose a proper system based on requirements of the target application. For that, students are able to distinguish physical values measured by optics such as radiometry and photometry, and draw the structure and operation principle of basic optical components (laser, photodiodes, CCD, ...). Based on the physics and the basic components for optical metrology, students are able to design a complete optical metrology system such as laser Doppler Vibrometer, speckle interferometry, and lidar, explain the benefits and drawback of each optical metrology system, and justify the choice of the tool in various application examples.

After successful completion of the lab classes, student are able to build optical measurement systems (Michelson interferometry and speckle interferometry) from the basic optical components on an optical breadboard and calculated the target physical quantity from the measured data. In addition, students are able to operates the advanced optical metrology systems (laser Doppler Vibrometer, Thermal camera, wavefront sensor, and lidar) and demonstrate its advantages and limitations in various applications.

Subject of course

Fundamentals of Measurement
Concept, SI units, uncertainty

Introduction to Optical Metrology
optical radiation, light, EM wave, spectrum

Detecting optical radiation
Radiometric and photometric quantities

Optical radiation as EM wave
Description, characteristics, polarization, light/matter interaction, dispersion, refraction, reflection, transmission

Radiation sources and optical radiation
Natural sources of radiation, thermal radiation

Optical temperature measurement
Pyrometers, thermal imaging

Laser
Properties, setup, types of lasers, Gaussian beam, coherence

Interferometer
Michelson, Mach-Zehnder and Sagnac interferometer Coherence-tomography

Semiconductor light sources and semiconductor laser
Detectors
Photoelectric effect, photoelectric cell and photomultiplier, semiconductor detectors (diodes, PSD, CCD and CMOS), thermal detectors (QWIP, thermopile, bolometer, pyro-electric)

Speckle metrology and holography
Properties of laser speckle interferometer, speckle correlation, holographic interferometry

Optical flow measurement
Optical Doppler effect, Laser Doppler Anemometer, Particle Dynamics Analysis, Particle Image Velocimetry, Vibrometer, Schlieren optics

Light Detection and Ranging (LIDAR) 
Optical Ranging Principle, Reflection from Materials, SNR and performance, Scanning and Nonscanning LIDAR

Wavefront Sensing (WFS)
Diffraction Imaging, Principle, Aberration, Measurements

* The 2 days lab exercises are organized with two groups. Students will be asigned on either group A or B.


Teaching methods

The lecture is given as presentation to explain the fundamental physics for optical metrology, basic components of optical metrology, and various optical metrology tools.  For further experience of optical metrology tools, lab classes follow after the lectures.

Mode of examination

Immanent

Additional information

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to complete the module, also the lecture 376.052 Nanometrology has to be visited.

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Fri08:00 - 10:0012.03.2021 - 28.05.2021 Online (Zoom) (LIVE)Lecture
Wed00:00 - 00:0021.04.2021 Online (Zoom) (LIVE)Lecture
Wed08:00 - 10:0012.05.2021 Online (Zoom) (LIVE)Lecture
Mon08:00 - 10:0031.05.2021 Online (Zoom) (LIVE)Lecture
Tue08:00 - 10:0001.06.2021 Online (Zoom) (LIVE)Lecture
09:00 - 15:3007.06.2021 - 09.06.2021Messtechnik Labor Lab Exercise
Optical Metrology - Single appointments
DayDateTimeLocationDescription
Fri12.03.202108:00 - 10:00 Online (Zoom)Lecture
Fri19.03.202108:00 - 10:00 Online (Zoom)Lecture
Fri26.03.202108:00 - 10:00 Online (Zoom)Lecture
Fri16.04.202108:00 - 10:00 Online (Zoom)Lecture
Wed21.04.202100:00 - 00:00 Online (Zoom)Lecture
Fri23.04.202108:00 - 10:00 Online (Zoom)Lecture
Fri30.04.202108:00 - 10:00 Online (Zoom)Lecture
Fri07.05.202108:00 - 10:00 Online (Zoom)Lecture
Wed12.05.202108:00 - 10:00 Online (Zoom)Lecture
Fri21.05.202108:00 - 10:00 Online (Zoom)Lecture
Fri28.05.202108:00 - 10:00 Online (Zoom)Lecture
Mon31.05.202108:00 - 10:00 Online (Zoom)Lecture
Tue01.06.202108:00 - 10:00 Online (Zoom)Lecture
Mon07.06.202109:00 - 15:30Messtechnik Labor Lab Exercise
Tue08.06.202109:00 - 15:30Messtechnik Labor Lab Exercise
Wed09.06.202109:00 - 15:30Messtechnik Labor Lab Exercise
Course is held blocked

Examination modalities

Submission of a lab report, a written exam about the course materials (an oral exam instated upon request)

Exams

DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Fri10:00 - 12:0017.05.2024 ACIN Computer lab (CA 04 26)written12.04.2024 08:00 - 16.05.2024 23:59TISSFinal Exam
Wed10:00 - 12:0029.05.2024 Computer Lab E376, CA0426written12.04.2024 00:00 - 28.05.2024 23:59TISSFinal Exam

Group dates

GroupDayTimeDateLocationDescription
Lab Group AMon09:00 - 11:3007.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group A
Lab Group AMon13:00 - 15:3007.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group A
Lab Group ATue09:00 - 11:3008.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group A
Lab Group ATue13:00 - 15:3008.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group A
Lab Group BMon09:00 - 11:3007.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group B
Lab Group BMon13:00 - 15:3007.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group B
Lab Group BWed09:00 - 11:3009.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group B
Lab Group BWed13:00 - 15:3009.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group B
Lab Group CTue09:00 - 11:3008.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group C
Lab Group CTue13:00 - 15:3008.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group C
Lab Group CWed09:00 - 11:3009.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group C
Lab Group CWed13:00 - 15:3009.06.2021Messtechnik Labor 376.053 Optical Metrology Lab Group C

Course registration

Begin End Deregistration end
02.02.2021 00:00 07.06.2021 09:00 07.06.2021 09:00

Group Registration

GroupRegistration FromTo
Lab Group A01.06.2021 12:0007.06.2021 08:59
Lab Group B01.06.2021 12:0007.06.2021 08:59
Lab Group C01.06.2021 18:0007.06.2021 08:59

Curricula

Study CodeObligationSemesterPrecon.Info
066 506 Energy Systems and Automation Technology Not specified

Literature

No lecture notes are available.

Previous knowledge

Basic knowledge in optics and electrodynamics

Accompanying courses

Miscellaneous

  • Attendance Required!

Language

English