376.053 Optical Metrology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2019S, VU, 3.0h, 4.5EC, to be held in blocked form


  • Semester hours: 3.0
  • Credits: 4.5
  • Type: VU Lecture and Exercise

Aim of course

In the course of this selective module the students are introduced to basic schemes and detailed insights of optical measurement systems and procedures. They learn the necessary foundations to understand, use, analyze, and develop optical systems.

During the lecture part fundamentals of optics are repeated and based on that the students are guided towards the understanding of complex optical measurement systems. During three afternoons in the laboratory, the students deepen their knowledge by building and evaluating a number of optical measurement systems (including data processing).


Laser speckle interferometer

Subject of course

Fundamentals of Measurement
Concept, SI units, uncertainty

Introduction to Optical Metrology
optical radiation, light, EM wave, spectrum

Detecting optical radiation
Radiometric and photometric quantities

Optical radiation as EM wave
Description, characteristics, polarization, light/matter interaction, dispersion, refraction, reflection, transmission

Radiation sources and optical radiation
Natural sources of radiation, thermal radiation

Optical temperature measurement
Pyrometers, thermal imaging

Properties, setup, types of lasers, Gaussian beam, coherence

Michelson, Mach-Zehnder and Sagnac interferometer Coherence-tomography

Semiconductor light sources and semiconductor laser
Photoelectric effect, photoelectric cell and photomultiplier, semiconductor detectors (diodes, PSD, CCD and CMOS), thermal detectors (QWIP, thermopile, bolometer, pyro-electric)

Speckle metrology and holography
Properties of laser speckle interferometer, speckle correlation, holographic interferometry

Optical flow measurement
Optical Doppler effect, Laser Doppler Anemometer, Particle Dynamics Analysis, Particle Image Velocimetry, Vibrometer, Schlieren optics

Light Detection and Ranging (LIDAR) 
Optical Ranging Principle, Reflection from Materials, SNR and performance, Scanning and Nonscanning LIDAR

Wavefront Sensing (WFS)
Diffraction Imaging, Principle, Aberration, Measurements

* The 2 days lab exercises are organized with two groups. Students will be asigned on either group A or B.

Additional information

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to complete the module, also the lecture 376.052 Nanometrology has to be visited.



Course dates

Fri11:00 - 17:0008.03.2019 CA 0426, Computer laboratory ACINLecture (Lunch 13:00-15:00)
Fri11:00 - 16:3015.03.2019 CA 0426, Computer laboratory ACINLecture (Lunch 13:00-14:30)
Fri11:00 - 16:3022.03.2019 CA 0426, Computer laboratory ACINLecture (Lunch 13:00-14:30)
Fri11:00 - 16:3029.03.2019 CA 0426, Computer laboratory ACINLecture (Lunch 13:00-14:30)
Fri11:00 - 16:3005.04.2019 CA 0426, Computer laboratory ACINLecture (Lunch 13:00-14:30)
Fri11:00 - 16:3012.04.2019 CA 0426, Computer laboratory ACINLecture (Lunch 13:00-14:30)
Fri08:30 - 16:0010.05.2019 Metrology lab (CA0402)Exercise
Fri09:00 - 16:0017.05.2019 metrology lab (CA0402)Exercise
Course is held blocked

Examination modalities

The course is blocked (3 modules), where each module consists of lecture units and is completed by a laboratory .

At the end of the course a written examination will take place.

Course registration

Begin End Deregistration end
29.01.2019 00:00 12.04.2019 23:59 12.04.2019 23:59



No lecture notes are available.

Previous knowledge

Basic knowledge in optics and electrodynamics

Accompanying courses


  • Attendance Required!