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376.052 Nanometrology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023S, VU, 3.0h, 4.5EC, to be held in blocked form


  • Semester hours: 3.0
  • Credits: 4.5
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to:

  • Explain the particular physical principles relevant to measurements at the nanometer scale.
  • Compare the most important Scanning Probe Microscopy (SPM) measurement techniques and select a suitable method for a specific measurement task.
  • Explain the working principle of Atomic Force Microscopy (AFM) and its components.
  • Operate an Atomic Force Microscope in the Lab.
  • Prepare samples and analyze their surface by AFM.
  • Present scientific literature from the field of SPM/AFM.

Subject of course

Background and physical principles at the nanometer scale, forces, limits, scaling-effects, high-resolution imaging systems, SEM, TEM, Scanning Tunnelling Microscopy (STM), Atomic Force Microscopy (AFM), Kelvin Probe Force Microscopy (KPFM), Magnetic Force Microscopy (MFM), force measurement, single molecule spectroscopy, dynamics of AFM and video-rate AFM, image processing, nano-mechanical characterization, nanoindentation, nanolithography, particle manipulation, nano-robotics, scientific instrumentation, physical sensor and actuator principles.

Commercial AFM from Bruker CooperationMFM image of a hard disc drive (HDD).

Teaching methods

Lectures, lab practicals

Mode of examination


Additional information

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to pass the module, the lecture 376.052 Optical metrology also has to be taken.



Course dates

09:00 - 17:0031.05.2023 - 13.06.2023 AFM Labor (ACIN CA0432)Nanometrology
Nanometrology - Single appointments
Wed31.05.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Thu01.06.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Fri02.06.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Mon05.06.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Tue06.06.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Wed07.06.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Fri09.06.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Mon12.06.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Tue13.06.202309:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Course is held blocked

Examination modalities

  1. Oral exam, 2-3 weeks after the course (date/time see under exam): 50%
  2. Seminar presentation: 25%
  3. Short lab report: 25%

Attendance at lectures and lab practicals is compulsory (in-person)!

Due to the coronavirus pandemic it may be necessary to change the course modalities on short notice.

Course registration

Begin End Deregistration end
03.02.2023 00:00 24.05.2023 22:59 24.05.2023 22:59


Study CodeObligationSemesterPrecon.Info
066 506 Energy Systems and Automation Technology Not specified
066 515 Automation and Robotic Systems Mandatory elective


No lecture notes are available.

Accompanying courses


  • Attendance Required!