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376.052 Nanometrology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022S, VU, 3.0h, 4.5EC, to be held in blocked form


  • Semester hours: 3.0
  • Credits: 4.5
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to:

  • Explain the particular physical principles relevant to measurements at the nanometer scale.
  • Compare the most important Scanning Probe Microscopy (SPM) measurement techniques and select a suitable method for a specific measurement task.
  • Explain the working principle of Atomic Force Microscopy (AFM) and its components.
  • Operate an Atomic Force Microscope in the Lab.
  • Prepare samples and analyze their surface by AFM.
  • Present scientific literature from the field of SPM/AFM.

Subject of course

Background and physical principles at the nanometer scale, forces, limits, scaling-effects, high-resolution imaging systems, SEM, TEM, Scanning Tunnelling Microscopy (STM), Atomic Force Microscopy (AFM), Kelvin Probe Force Microscopy (KPFM), Magnetic Force Microscopy (MFM), force measurement, single molecule spectroscopy, dynamics of AFM and video-rate AFM, image processing, nano-mechanical characterization, nanoindentation, nanolithography, particle manipulation, nano-robotics, scientific instrumentation, physical sensor and actuator principles.

Commercial AFM from Bruker CooperationMFM image of a hard disc drive (HDD).

Teaching methods

Lectures, lab practicals

Mode of examination


Additional information

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to pass the module, the lecture 376.052 Optical metrology also has to be taken.



Course dates

09:00 - 17:0013.06.2022 - 24.06.2022 AFM Labor (ACIN CA0432)Nanometrology
Nanometrology - Single appointments
Mon13.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Tue14.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Wed15.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Fri17.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Mon20.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Tue21.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Wed22.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Thu23.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Fri24.06.202209:00 - 17:00 AFM Labor (ACIN CA0432)Nanometrology
Course is held blocked

Examination modalities

  1. Oral exam, 2-3 weeks after the course (date/time see under exam): 50%
  2. Seminar presentation: 25%
  3. Short lab report: 25%

Attendance at lectures and lab practicals is compulsory (in-person)!

Due to the coronavirus pandemic it may be necessary to change the course modalities on short notice.


DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Fri10:00 - 13:0007.07.2023 oral14.06.2023 23:59 - 06.07.2023 23:59TISSNanometrology oral exam 2022
Fri10:00 - 13:0014.07.2023 oral14.06.2023 23:59 - 06.07.2023 23:59TISSNanometrology oral exam 2022

Course registration

Begin End Deregistration end
07.03.2022 00:00 07.06.2022 22:59 25.05.2022 22:59



No lecture notes are available.

Accompanying courses


  • Attendance Required!