376.052 Nanometrology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2020S, VU, 3.0h, 4.5EC, to be held in blocked form


  • Semester hours: 3.0
  • Credits: 4.5
  • Type: VU Lecture and Exercise

Learning outcomes

After successful completion of the course, students are able to:

  • Explain the particular physical principles relevant to measurements at the nanometer scale.
  • Compare the most important Scanning Probe Microscopy (SPM) measurement techniques and select a suitable method for a specific measurement task.
  • Explain the working principle of Atomic Force Microscopy (AFM) and its components.
  • Operate an Atomic Force Microscope in the Lab.
  • Prepare samples and analyze their surface by AFM.
  • Present scientific literature from the field of SPM/AFM.

Subject of course

Background and physical principles at the nanometer scale, forces, limits, scaling-effects, high-resolution imaging systems, SEM, TEM, Scanning Tunnelling Microscopy (STM), Atomic Force Microscopy (AFM), Kelvin Probe Force Microscopy (KPFM), Magnetic Force Microscopy (MFM), force measurement, single molecule spectroscopy, dynamics of AFM and video-rate AFM, image processing, nano-mechanical characterization, nanoindentation, nanolithography, particle manipulation, nano-robotics, scientific instrumentation, physical sensor and actuator principles.

Commercial AFM from Bruker CooperationMFM image of a hard disc drive (HDD).

Teaching methods

Lectures, lab practicals

Mode of examination


Additional information

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to pass the module, the lecture 376.052 Optical metrology also has to be taken.



Course dates

09:00 - 17:0007.09.2020 - 18.09.2020 AFM Lab ACIN (CA0431)Nanometrology
Nanometrology - Single appointments
Mon07.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Tue08.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Wed09.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Thu10.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Fri11.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Mon14.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Tue15.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Wed16.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Thu17.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Fri18.09.202009:00 - 17:00 AFM Lab ACIN (CA0431)Nanometrology
Course is held blocked

Examination modalities

  1. Unseen, written exam, 2-3 weeks after the course (date/time see under exam): 50%
  2. Seminar presentation: 25%
  3. Short lab report: 25%

Attendance at lectures and lab practicals compulsory!

Course registration

Begin End Deregistration end
27.01.2020 00:00 15.08.2020 22:59 15.08.2020 22:59



No lecture notes are available.

Accompanying courses


  • Attendance Required!