After successful completion of the course, students are able to:

• Explain the particular physical principles relevant to measurements at the nanometer scale.
• Compare the most important Scanning Probe Microscopy (SPM) measurement techniques and select a suitable method for a specific measurement task.
• Explain the working principle of Atomic Force Microscopy (AFM) and its components.
• Operate an Atomic Force Microscope in the Lab.
• Prepare samples and analyze their surface by AFM.
• Present scientific literature from the field of SPM/AFM.

Background and physical principles at the nanometer scale, forces, limits, scaling-effects, high-resolution imaging systems, SEM, TEM, Scanning Tunnelling Microscopy (STM), Atomic Force Microscopy (AFM), Kelvin Probe Force Microscopy (KPFM), Magnetic Force Microscopy (MFM), force measurement, single molecule spectroscopy, dynamics of AFM and video-rate AFM, image processing, nano-mechanical characterization, nanoindentation, nanolithography, particle manipulation, nano-robotics, scientific instrumentation, physical sensor and actuator principles.

Lectures, lab practicals

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to pass the module, the lecture 376.052 Optical metrology also has to be taken.

1. Unseen, oral exam, 2-3 weeks after the course (date/time see under exam): 50%
2. Seminar presentation: 25%
3. Short lab report: 25%

Attendance at lectures (online) and lab practicals (in-person) compulsory!