376.052 Nanometrology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2020S, VU, 3.0h, 4.5EC, to be held in blocked form


  • Semester hours: 3.0
  • Credits: 4.5
  • Type: VU Lecture and Exercise

Learning outcomes

After successful completion of the course, students are able to:

  • explain the particular physical principles relevant to measurements at the nanometer scale.
  • compare the most important Scanning Probe Microscopy (SPM) measurement techniques and to select the suitable method for a specific measurement task.
  • explain the working principle of Atomic Force Microscopy (AFM) and its components.
  • operate an Atomic Force Microscope in the Lab.
  • prepare samples and analyze its surface by AFM.
  • present scientific literature from the field of SPM/AFM.

Subject of course

Background and physical principles of the nano meter scale, forces, limits, scaling effects, high resolution imaging systems, SEM, TEM, Scanning Tunnelling Microscopy (STM), Atomic Force Microscopy (AFM), Kelvin Probe Force Microscopy (KPFM), Magnetic Force Microscopy (MFM), force measurement, single molecule spectroscopy, dynamics of AFM and video-rate AFM, image processing, nano mechanic characterization, nano indentation, nano lithography, particle manipulation, nano robotic, scientific instrumentation, physical senor and actuator principles.

Commercial AFM from Bruker CooperationMFM image of a hard disc drive (HDD).

Teaching methods

Lecture, Lab exercise

Mode of examination


Additional information

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to complete the module, also the lecture 376.052 Optical metrology has to be visited.



Course dates

Wed09:00 - 13:0003.06.2020 Meeting room CA0532Lecture
Wed13:00 - 18:0003.06.2020 AFM Lab ACIN (CA0431)Lab group 1
Thu09:00 - 13:0004.06.2020 Computerlabor CA0426Lecture
Thu13:00 - 18:0004.06.2020 AFM Lab ACIN (CA0431)Lab group 1
Fri09:00 - 13:0005.06.2020 Computerlabor CA0426Lecture
Fri13:00 - 18:0005.06.2020 AFM Lab ACIN (CA0431)Lab group 1
Mon09:00 - 13:0008.06.2020 Computerlabor CA0426Lecture
Mon13:00 - 18:0008.06.2020 AFM Lab ACIN (CA0431)Lab group 2
Tue09:00 - 18:0009.06.2020 AFM Lab ACIN (CA0431)Lab group 2
Wed09:00 - 13:0010.06.2020 Meeting room CA0532Lecture
Wed13:00 - 18:0010.06.2020 AFM Lab ACIN (CA0431)Lab group 1
Fri09:00 - 18:0012.06.2020 AFM Lab ACIN (CA0431)Lab group 1
Mon13:00 - 18:0015.06.2020 AFM Lab ACIN (CA0431)Lab group 2
Tue09:00 - 13:0016.06.2020 Computerlabor CA0426Lecture
Tue09:00 - 18:0016.06.2020 AFM Lab ACIN (CA0431)Lab group 2
Course is held blocked

Examination modalities

  1. Written exam 2-3 weeks after the course (dat/time see under exam): 50%
  2. Seminar presentation: 25%
  3. Short lab report: 25%

Attendence during lecture and lab exercises required!


DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Fri10:00 - 11:3026.06.2020 Computerlabor CA0426written03.06.2020 09:00 - 24.06.2020 12:00TISSNanometrology schriftl. Prüfung 1
Fri10:00 - 11:3003.07.2020 Computerlabor CA0426written03.06.2020 09:00 - 24.06.2020 12:00TISSNanometrology schriftl. Prüfung 2

Course registration

Begin End Deregistration end
27.01.2020 00:00 20.05.2020 22:59 20.05.2020 22:59



No lecture notes are available.

Accompanying courses


  • Attendance Required!