The aim of this intensification course for master and PhD students is to offer detailed insights into nano measurement technology with a focus on Atomic Force Microscopy (AFM). This includes the corresponding instrumentation and challenges of mechatronic applications.

In the practical part of the course the students will intensify their gathered knowledge from the lectures with hands-on training on laboratory equipment of ACIN.

Background and physical principles of the nano meter scale, forces, limits, scaling effects, high resolution imaging systems, SEM, TEM, Scanning Tunnelling Microscopy (STM), Atomic Force Microscopy (AFM), Kelvin Probe Force Microscopy (KPFM), Magnetic Force Microscopy (MFM), force measurement, single molecule spectroscopy, dynamics of AFM and video-rate AFM, image processing, nano mechanic characterization, nano indentation, nano lithography, particle manipulation, nano robotic, scientific instrumentation, physical senor and actuator principles.

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to complete the module, also the lecture 376.052 Optical metrology has to be visited.

This VU is continuous assessment courses. Additionally there is a final writan/oral exam at the end of the lecture.