After successful completion of the course, students are able to...

• to behave properly and safely in laboratories
• to behave correctly in the clean room and to explain the essential aspects of work in the clean room
• understand basic microfabrication concepts
• handle samples correctly, store and dispose of them correctly
• recognize the dangers of working with chemicals and be able to work safely with chemicals accordingly
• recognizing and avoiding dangers emanating from lasers
• recognize and avoid dangers that arise when working with electrical measurement technology

• Basic behavior in the laboratory / laboratory safety
• Behavior in the clean room (clean room technology, clothing, particle sources, movement in the clean room, etc.)
• Basic concepts of microfabrication (additive and subtractive processes, technology, lithography)
• Sample handling (wafer handling, storage, singulation, hazards, disposal, etc.)
• Chemicals (classification, hazards, safe working, PPE, disposal, etc.)
• Working with lasers (how they work, classes, dangers, etc.)
• Electrical measurement technology (dangers, basics, measurement methods, etc.)

Recorded frontal lecture, slides are available

Performance is checked by a written test (in the TUWEL) and by an oral final discussion.