366.103 Theory, modelling and simulation of MEMS and NEMS devices
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021W, VO, 2.0h, 3.0EC

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

  • Model the mechanical behavior of MEMS/NEMS by continuum mechanics.
  • State and test the underlying assumptions of the theory of linear elasticity.
  • Describe the interaction between MEMS/NEMS and fluids.
  • Model the piezoelectric effect.
  • Calculate the eigenmodes and eigenfrequencies of selected structures.
  • Derive the differences between macroscopic and microscopic systems
  • Predict the dynamics of resonators.
  • Derive the basic theory of the method of finite elements.
  • Explain the working principle of reference oscillators, mass und fluid sensors.
  • Discuss novel concepts like phononic crystals and quantum MEMS/NEMS.
  • Understand technical subject-specific technical terminology and critically evaluate relevant scientific publications.
  • Use open source software for eigenmode analysis.

Subject of course

The design of micro- and nanoelectromechanical systems (MEMS/NEMS) is a highly interdisciplinary field which reflects in the variety of topics of this course. Starting from an introduction to continuum mechanics and piezoelectricity we investigate different aspects of the mechanics of basic MEMS/NEMS structures like membranes and beams. By understanding the interaction of MEMS/NEMS with their environment, we are able to understand the outstanding performance of MEMS/NEMS sensors for mass and fluid sensing. Another important aspect for the modelling of MEMS/NEMS is the representation of MEMS/NEMS with discrete lumped element models and we discuss the most important discrete models. For quantitative predictions often numerical methods need to be employed for which the finite element method (FEM) is the most known. We discuss the fundamental theory of the finite element method and its limitations. Using the above theory, we study example applications like reference oscillators or fluid sensors. Additionally, we take a look at novel concepts like phononic crystals or quantum MEMS/NEMS. As part of the course, participants will read and discuss a recent scientific publication and implement finite element simulations in Python.

Teaching methods

  • Presentation and discussion of contents during lectures
  • Independent study of scientific publications and their discussion
  • Implementation of finite element simulations in Python

Mode of examination

Oral

Additional information

The dates for the lectures will be discussed with the course participants during the initial meeting.

Link to the initial meeting:

https://tuwien.zoom.us/j/97449931080?pwd=eFg0cWZ3aUpXaFJnSkxFZEdMbXlZQT09

Topic: MEMS/NEMS Theory - Initial Meeting and Scheduling

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Fri13:00 - 14:0008.10.2021 Den Link finden Sie unter "weitere Informationen"Initial Meeting
Thu13:00 - 15:0021.10.2021 - 27.01.2022 Link will be anncouncen in TISS in time (LIVE)Lecture
Theory, modelling and simulation of MEMS and NEMS devices - Single appointments
DayDateTimeLocationDescription
Fri08.10.202113:00 - 14:00 Den Link finden Sie unter "weitere Informationen"Initial Meeting
Thu21.10.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu28.10.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu04.11.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu11.11.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu18.11.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu25.11.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu02.12.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu09.12.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu16.12.202113:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu13.01.202213:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu20.01.202213:00 - 15:00 Link will be anncouncen in TISS in timeLecture
Thu27.01.202213:00 - 15:00 Link will be anncouncen in TISS in timeLecture

Examination modalities

Discussion of different topics of the lecture.

Course registration

Begin End Deregistration end
04.10.2021 08:00 27.10.2021 23:59 27.10.2021 23:59

Curricula

Literature

No lecture notes are available.

Language

if required in English