After successful completion of the course, students are able to...

• Model the mechanical behavior of MEMS/NEMS by continuum mechanics.
• State and test the underlying assumptions of the theory of linear elasticity.
• Describe the interaction between MEMS/NEMS and fluids.
• Model the piezoelectric effect.
• Calculate the eigenmodes and eigenfrequencies of selected structures.
• Derive the differences between macroscopic and microscopic systems
• Predict the dynamics of resonators.
• Derive the basic theory of the method of finite elements.
• Explain the working principle of reference oscillators, mass und fluid sensors.
• Discuss novel concepts like phononic crystals and quantum MEMS/NEMS.
• Understand technical subject-specific technical terminology and critically evaluate relevant scientific publications.
• Use open source software for eigenmode analysis.

The design of micro- and nanoelectromechanical systems (MEMS/NEMS) is a highly interdisciplinary field which reflects in the variety of topics of this course. Starting from an introduction to continuum mechanics and piezoelectricity we investigate different aspects of the mechanics of basic MEMS/NEMS structures like membranes and beams. By understanding the interaction of MEMS/NEMS with their environment, we are able to understand the outstanding performance of MEMS/NEMS sensors for mass and fluid sensing. Another important aspect for the modelling of MEMS/NEMS is the representation of MEMS/NEMS with discrete lumped element models and we discuss the most important discrete models. For quantitative predictions often numerical methods need to be employed for which the finite element method (FEM) is the most known. We discuss the fundamental theory of the finite element method and its limitations. Using the above theory, we study example applications like reference oscillators or fluid sensors. Additionally, we take a look at novel concepts like phononic crystals or quantum MEMS/NEMS. As part of the course, participants will read and discuss a recent scientific publication and implement finite element simulations in Python.

• Presentation and discussion of contents during lectures
• Independent study of scientific publications and their discussion
• Implementation of finite element simulations in Python

Presentation of the ISAS Lectures:
Monday, 7 October 2019 at 1 pm, Hörsaal EI4 (Reithoffer HS)

Discussion of different topics of the lecture.