Micro- and nanoelectromechanical systems (MEMS/NEMS) are an active field of research which is driven by two developments. MEMS/NEMS devices are integrated in a rapidly increasing number of devices which surround us in our daily lives. Additionally, micro- and nanomechanical devices are used in more and more fields of basic research like bio-analytics and quantum optics. Due to the enormous advances in fabrication technology the device design plays a vital role in both of these fields of application. To understand and drive this development this course presents the necessary theoretical, mathematical and numerical skills.

MEMS/NEMS design is a highly interdisciplinary field of research. Starting form an introduction to continuum mechanics and piezoelectricity we study advanced mechanics of basic elastic bodies like membranes and cantilever beams. To understand MEMS/NEMS applications we also look at the interactions of a body with its environment. These interactions can be for example of fluid mechanical, thermodynamical or electrodynamical nature. An important first step for the qualitative understanding of MEMS/NEMS devices is their representation as discrete models and we discuss the most important of those models. For quantitative predictions, numerical simulations are often required. One of the most well-known numerical methods is the finite element method (FEM). We present the foundations of the finite element method and discuss its applications and limitations. At the end of the course we use the tools we have learned to study example applications like pressure and viscosity sensors.

Presentation of the Lecture:

Monday, 1 October 20181 pm, Hörsaal EI4 (Reithoffer HS)