After successful completion of the course, students are able to...
The design of micro- and nanoelectromechanical systems (MEMS/NEMS) is a highly interdisciplinary field which reflects in the variety of topics of this course. Starting from an introduction to continuum mechanics and piezoelectricity we investigate different aspects of the mechanics of basic MEMS/NEMS structures like membranes and beams. By understanding the interaction of MEMS/NEMS with their environment, we are able to understand the outstanding performance of MEMS/NEMS sensors for mass and fluid sensing. Another important aspect for the modelling of MEMS/NEMS is the representation of MEMS/NEMS with discrete lumped element models and we discuss the most important discrete models. For quantitative predictions often numerical methods need to be employed for which the finite element method (FEM) is the most known. We discuss the fundamental theory of the finite element method and its limitations. Using the above theory, we study example applications like reference oscillators or fluid sensors. Additionally, we take a look at novel concepts like quantum MEMS/NEMS. As part of the course, participants will read and discuss a recent scientific publication and implement finite element simulations in Python.
Initial meeting: Thursday, October 5th, 2023 at 1 pm in CD0112
Discussion of different topics of the lecture.
