366.091 MEMS Technology and Devices
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021S, SE, 2.0h, 3.0EC

Course evaluation


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: SE Seminar
  • Format: Distance Learning

Learning outcomes

After successful completion of the course, students are able to...

  • State recent aspects of MEMS research
  • Read and understand scientific publications
  • Identify and compare different scientific approaches
  • Research, collect and structure additional scientific literature
  • Summarize results of literature reviews
  • Present and discuss scientific content for an audience

Subject of course

In this course, students get insight into recent questions and the state of the art in MEMS research by studying scientific literature. Possible topics can be found in the areas of technology development, devices and systems, modelling and simulation and measurement and control electronics. Students can also suggest topics. The results of the literature review will be discussed in detail and will be presented in a talk at the end of the course.

Teaching methods

  • Independent study of scientific literature
  • Discussion of scientific questions
  • Scientific Talk

Mode of examination


Additional information

Technical equipment:
Device for participating in online meetings including audio and video transmission

Please consider the plagiarism guidelines of TU Wien when writing your seminar paper: Directive concerning the handling of plagiarism (PDF)



Examination modalities

Summary of results in online-presentation

Course registration

Begin End Deregistration end
01.03.2021 16:00 07.03.2021 23:59



The presentation slides will be available as handouts.