The course covers industry-relevant, actual topics in the field of micro- and nano systems technology, but also related fields, such as materials and technologies for power electronic devices. The high practical relevance is ensured by lectures given by industry representatives from the corresponding field. The presented application-specific MEMS / NEMS devices will then be discussed with respect to fabrication technologies, device performance, and their system integration capability. Specific technical challenges for integration into technically relevant systems such as automotive, aircraft, consumer goods are also covered.
