366.090 Micro- and nanoelectromechanical systems
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022W, VO, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

  • to explain various materials and technologies of micro- and nano-systems technology as well as related fields such as power electronics in a comprehensive manner and to be able to analyze the corresponding characteristic features, advantages and disadvantages as well as application areas.
  • to critically discuss different concepts for the realization of micro- and nanostructured devices and to be able to analyze the corresponding features, advantages and disadvantages as well as application areas.
  • to analyze common industrial fields of applications.
  • to discuss critically research results and identify new research questions.

Subject of course

The course covers industry-relevant, actual topics in the field of micro- and nano systems technology, but also related fields, such as materials and technologies for power electronic devices. The high practical relevance is ensured by lectures given by industry representatives from the corresponding field. The presented application-specific MEMS / NEMS devices will then be discussed with respect to fabrication technologies, device performance, and their system integration capability. Specific technical challenges for integration into technically relevant systems such as automotive, aircraft, consumer goods are also covered.

Teaching methods


Mode of examination


Additional information



Course dates

Thu13:30 - 14:0006.10.2022Seminarraum 366 Preliminary lecture
Mon14:00 - 16:0009.01.2023Seminarraum 366 Lecture FH Kärnten
Tue10:00 - 12:0010.01.2023Seminarraum 366 Lecture USound - CANCLED
Thu14:00 - 16:0012.01.2023Seminarraum 366 Lecture Quantum Design Microscopy
Tue09:00 - 11:0017.01.2023Seminarraum 366 Lecture Xarion Laser Acoustics
Thu10:00 - 12:0019.01.2023Seminarraum 366 Lecture USound
Thu15:00 - 17:0019.01.2023Seminarraum 366 Lecture Infineon
Fri11:00 - 13:0020.01.2023Seminarraum 366 Lecture EVG
Fri15:00 - 17:0020.01.2023Seminarraum 366 Lecture TriLite
Mon11:00 - 13:0023.01.2023Seminarraum 366 Lecture TDK
Thu10:00 - 12:0026.01.2023Seminarraum 366 Lecture Airbus
Fri09:00 - 11:0027.01.2023Seminarraum 366 Vortrag Infineon Villach
Fri13:00 - 14:3003.02.2023 Online Lecture - Link will be announced in time (LIVE)ONLINE lecture Robert Bosch GmbH

Examination modalities

Evaluation is done by oral exam after individual appointments.

Course registration

Begin End Deregistration end
03.10.2022 08:00 08.01.2023 23:59 08.01.2023 23:59


Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Not specified
066 504 Master programme Embedded Systems Not specified
066 508 Microelectronics and Photonics Not specified


Slides will be available.