366.089 Simulation of MEMS Canceled
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2016S, VU, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise

Aim of course

Design and simulation of MEMS pressure sensors applying both analytical and finite element method (FEM) calculations.

Subject of course

Within this course, the specific design of a micromachined pressure sensor using analytical calculations is targeted as well as by utilizing the finite element method (FEM). This course includes basics of mechanics and material science being necessary for the design of such a sensor device. In the second part of the course, state of the art FEM software such as COMSOL is introduced and used for the simulation of the sensor performance.



Course registration

Begin End Deregistration end
01.03.2016 08:00 31.03.2016 23:59 31.03.2016 23:59



No lecture notes are available.