Design and simulation of MEMS pressure sensors applying both analytical and finite element method (FEM) calculations.

Within this course, the specific design of a micromachined pressure sensor using analytical calculations is targeted as well as by utilizing the finite element method (FEM). This course includes basics of mechanics and material science being necessary for the design of such a sensor device. In the second part of the course, state of the art FEM software such as COMSOL is introduced and used for the simulation of the sensor performance.