366.088 Lab Microsystems Technology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023S, UE, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: UE Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

  • to identify and to work on subtasks of a given scientific topic in the field of micro- and nanostructured devices
  • to independently study scientific literature and to discuss its content.
  • to apply scientific methods to a given scientific problem under guidance.
  • to discuss critically own research results and to recognize new scientific questions.
  • to summarize the results of their own scientific work and to discuss it in front of an audience.

Subject of course

Based on the lecture Sensors and Sensor Systems and the Fachvertiefung Microsensor Technology, this lab course will provide in-depth practical training related to actual, on-going research topics. The focus can be on technologies for micro- and nanostructured devices in the field of MEMS, NEMS or power electronics under clean room conditions, as well as in the field of their or measurement technology. But a focus in the field of simulation and modeling of micro- and nanostructured devices is also possible. The results achieved will be discussed regularly and summarized by the students in a talk at the end of the course.

Teaching methods

Independent, scientific work in measurement and cleanroom laboratories under guidance, independent application of theoretical models to given, scientific questions under guidance, study of scientific literature.

Mode of examination




Course dates

Mon13:00 - 13:3006.03.2023Seminarraum 366 Preliminary lecture

Examination modalities

Talk with discussion of the results.

Course registration

Not necessary


Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Not specified
066 504 Master programme Embedded Systems Mandatory elective
066 507 Telecommunications Mandatory elective
066 508 Microelectronics and Photonics Mandatory elective
066 515 Automation and Robotic Systems Mandatory elective


No lecture notes are available.