366.088 Lab Microsystems Technology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022S, UE, 2.0h, 3.0EC, to be held in blocked form


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: UE Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

  • to identify and to work on subtasks of a given scientific topic in the field of micro- and nanostructured devices
  • to independently study scientific literature and to discuss its content.
  • to apply scientific methods to a given scientific problem under guidance.
  • to discuss critically own research results and to recognize new scientific questions.
  • to summarize the results of their own scientific work and to discuss it in front of an audience.

Subject of course

Based on the lecture Sensors and Sensor Systems and the Fachvertiefung Microsensor Technology, this lab course will provide in-depth practical training related to actual, on-going research topics. The focus can be on technologies for micro- and nanostructured devices in the field of MEMS, NEMS or power electronics under clean room conditions, as well as in the field of their or measurement technology. But a focus in the field of simulation and modeling of micro- and nanostructured devices is also possible. The results achieved will be discussed regularly and summarized by the students in a talk at the end of the course.

Teaching methods

Independent, scientific work in measurement and cleanroom laboratories under guidance, independent application of theoretical models to given, scientific questions under guidance, study of scientific literature.

Mode of examination


Additional information

COVID-19 notice: Face masks are mandatory in the lab rooms during the course.



Course dates

Wed13:00 - 14:0002.03.2022Seminarraum 366 Preliminary lecture
Course is held blocked

Examination modalities

talk with discussion of the results.

Course registration

Not necessary



Slides will be available.