366.088 Lab Microsystems Technology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2018W, UE, 2.0h, 3.0EC, to be held in blocked form


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: UE Exercise

Aim of course

Laboratory course providing hands-on experience on actual topics in the fields of technology and characterization of MEMS devices.

Subject of course

The laboratory course on the basis of the Fachvertiefung Mikrosensortechnologie provides hands-on experience to the students in current MEMS research activities. The focus can be either on technology in the clean-room or on analytics and measurement technology, respectively. The lab work is supervised and the results shall be presented in a talk at the end of the course.

Additional information

Announcement for all :

Monday, 1 October 2018, 13.00 s.t., Hörsaal EI 4 (Reithoffer HS)



Course dates

Tue09:00 - 10:0002.10.2018 Meetingroom ISAS, Gußhausstrasse 27-29, Room CB0102Vorbesprechung
Course is held blocked

Course registration

Begin End Deregistration end
01.10.2018 08:00 16.10.2018 23:59



The presentation slides will be available as handouts.