After successful completion of the course, students are able to...

• … describe scaling effects on the micro scale and to explain the physics behind them.
• … outline and discuss the basic mechnical equations.
• … discuss and analyse the impact of layer stress onto micro systems.
• … describe basic mechanical elements and to contrast advantages and disadvantages of those elements.
• … describe electrostatic actuators and to evaluate advantages and disadvantages as well as scopes of application.
• … describe electromagentic actuators and to evaluate advantages and disadvantages as well as scopes of application.
• … describe piezoelectric actuators and to evaluate advantages and disadvantages as well as scopes of application.
• … describe different types of resonators and to compare them to one another.
• … explain shape memory alloys and to evaluate advantages and disadvantages.
• … describe thermal actuators and to evaluate advantages and disadvantages as well as scopes of application.
• … explain basic terms in micro fluidics and to apply simple modeling techniques.
• … describe microfluidic pumps and to explain essential components.
• … to explain acousto-fluidic effects and devices and to assess the range of applications.

Content of the lecture are various actuator principles and their implementation in MEMS devices. The corresponding impact on the device performance is presented and discussed, including scaling effects. The focus is on physical principles (e.g. electrostatic, magnetic and piezoelectric) as well as unconventional effects such as shape-memory alloys. Furthermore, basics of microfluidics are introduced for micromachined actuators operated in fluidic environments such as valves.

This semester, knowledge transfer due to the Covid-19 situation is offered in a distance learning format. The inverted classroom is primarily used. This means that the lecture is made available as a recorded stream in TUWEL and that a video meeting (plenum) takes place every week in which open questions can be discussed. Between the lecture stream and plenum there will be time to collect questions anonymously via TUWEL, which will then also be discussed. Furthermore, there will be a few tasks each week that you should work on in preparation for the plenary session but also for the exam. We will discuss these solutions to the tasks in the plenary session.

The TUWEL course will open on 27.09. In the beginning, there will be a short overview presentation and a short video, where I will summarize the approach to this course. The first regular lecture is unlocked on october 4th.

Signing up in TISS is not required, please sign youself up in TUWEL.

The appointment for the plenary session will be made via TUWEL, further information will be available there.

Evaluation is done by online oral exam after individual appointments.

The presentation slides will be available as handouts.

Knowledge of VO Sensorik und Sensorsysteme (366.071) is useful.