After successful completion of the course, students are able to...

• … describe scaling effects on the micro scale and to explain the physics behind them.
• … outline and discuss the basic mechnical equations.
• … discuss and analyse the impact of layer stress onto micro systems.
• … describe basic mechanical elements and to contrast advantages and disadvantages of those elements.
• … describe electrostatic actuators and to evaluate advantages and disadvantages as well as scopes of application.
• … describe electromagentic actuators and to evaluate advantages and disadvantages as well as scopes of application.
• … describe piezoelectric actuators and to evaluate advantages and disadvantages as well as scopes of application.
• … describe different types of resonators and to compare them to one another.
• … explain shape memory alloys and to evaluate advantages and disadvantages.
• … describe thermal actuators and to evaluate advantages and disadvantages as well as scopes of application.
• … explain basic terms in micro fluidics and to apply simple modeling techniques.
• … describe microfluidic pumps and to explain essential components.
• … to explain acousto-fluidic effects and devices and to assess the range of applications.

Content of the lecture are various actuator principles and their implementation in MEMS devices. The corresponding impact on the device performance is presented and discussed, including scaling effects. The focus is on physical principles (e.g. electrostatic, magnetic and piezoelectric) as well as unconventional effects such as shape-memory alloys. Furthermore, basics of microfluidics are introduced for micromachined actuators operated in fluidic environments such as valves.

The knowledge transfer takes place primarily via frontal teaching. This is enhanced by interactive question rounds and the integration of media elements. On request, a tour of the institute is also offered.

Evaluation is done by oral exam after individual appointments.

The presentation slides will be available as handouts.

Knowledge of VO Sensorik und Sensorsysteme (366.071) is useful.