The goal is the production and characterization of a piezoelectrically operated resonant microsensor that can be used to detect ambient pressure variations. Essential technological processing steps are done in the institute's own cleanroom facilities, enabling hands-on experience in cutting-edge deposition and patterning techniques (such as vapor deposition and sputtering, CVD, mask aligner, DRIE for very high aspect ratio deep etching) for microsensor fabrication. The devices are then examined using suitable microscopy methods (optical, scanning electron microscope). Subsequently, the microstructures are resonantly excited, characterized under a microsystem analyzer with laser Doppler vibrometer to determine mode shapes and resonance frequencies and compared to theoretical models. The dependence of the vibration behavior on the ambient pressure is recorded electrically by means of time-dependent impedance measurements and evaluated with common theoretical approaches. Theoretical fundamentals of the resonators and the technology are prepared by the students at the beginning of the VU under guidance and the results presented in short oral lectures.
Presentation of all elective courses of ISAS: Monday, 1 October 2018, 13.00 s.t., Hörsaal EI 4 (Reithoffer HS)
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LVA 366.074:
Mandatory attendance. Limited seats: 15 Students
The grade consists of the assessment of the oral presentation, the entrance test as well as the participation during the practical work in the laboratory.
Documents for the oral presentations can be borrowed from the lecturers.
