The lecture is divided into 3 sections: in the first, key technologies for the realization of MEMS (micro electromechanical systems) sensors are presented. These include PVD (physical vapor deposition) and CVD (chemical vapor deposition) based thin film disposition techniques as well as fundamentals of optical lithography and etching. In addition, we present theoretical principles for modeling MEMS devices based on the finite element method. Furthermore, some examples are discussed to demonstrate the limits of FEM. In the second section, various realization concepts for MEMS are evaluated to sense physical quantities such as pressure, acceleration, rotation rate, flow and temperature. The fundamental principles of operation are explained, and typical application areas are introduced. In the third section, specific sensors for selected physical quantities and their integration into technical systems, such as automobiles or aircrafts, are introduced. Also actual research topics, such as the local energy supply of sensor nodes from the environment (energy harvesting), are addressed. It is the main goal of the lecture to provide to the students basic MEMS knowledge ranging from technology aspects via device realization to the system integration of selected MEMS sensor elements. The presentation and discussion of selected examples from actual research topics in the field of MEMS sensors as well as energy harvesting complete the lecture.
ATTENTION: The lecture on December 21, 2022 will take place ONLINE
Ulrich Schmid lädt Sie zu einem geplanten Zoom-Meeting ein.
Thema: LV Sensorik und Sensorsysteme - Flusssensoren
Uhrzeit: 21.Dez. 2022 08:15 AM Amsterdam, Berlin, Rom, Stockholm, Wien
Zoom-Meeting beitreten
https://tuwien.zoom.us/j/97076572505
Meeting-ID: 970 7657 2505
Lecture slides are available in TISS.
Further literature:
U. Mescheder:
Mikrosystemtechnik
Konzept und Anwendungen
Teubner-Verlag, Stuttgart
ISBN 3-519-06256-9
G. Gerlach, W. Dötzel
Grundlagen der Mikrosystemtechnik
Hanser Verlag, München
ISBN 3-446-18395-7
W. Menz, J. Mohr:
Mikrosystemtechnik für Ingenieure
VCH, Weinheim
ISBN: 3-527-294055-8
M. Madou:
Fundamentals of Microfabrication
CRC Press, Boca Raton
ISBN: 0-8493-9451-1