!!!Only for study programm for material sciences!!! Understanding the construction and function of sensors for the most important non-electric quantities (e.g. temperature, humidity, gas concentration, ion concentration, flow, pressure, force, acceleration, light intensity, magnetic field) and of applications of sensors. Comparison and discussion of different sensor technologies.
The lecture presents a survey of the most important sensors used in industry and of new sensor developments: Sensors for mechanical quantities, thermal sensors, chemical sensors, magnetic sensors, optical sensors. The various sensors are discussed with respect to their function, technology and possible applications. The lecture refers to the actual state of the art of microelectronic sensor technologies.