362.178 Processing chemistry for Micro- and Nanoelectronics
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021S, VU, 2.0h, 3.0EC, to be held in blocked form

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Online

Learning outcomes

After successful completion of the course, students are able to...

... to understand the course of chemical processes as the interaction of valence electrons.
... apply basic chemical knowledge to processes in semiconductor manufacturing.
... to calculate the necessary mass flows for chemical processes
... adjust buffer solutions with a desired pH value
... to understand redox reactions and exchange reactions as the basis of etching.
... estimate the solubility of substances as a consequence of their protic / aprotic and polar / apolar properties. ... correctly assess the dangers of chemicals in cleanrooms.

Basic knowledge of chemistry (compound classes, stoichiometric composition, acids / bases, RedOx reactions, thermodynamics, reaction kinetics, functionality of organic groups, nomenclature of organic compounds) will be ragained and applied onon examples from microstructuring (etching, lithography, cleaning with solvents, duration of reactions, mixing ratios of 2 reaction partners) .

Subject of course

Concepts in chemistry (pH, electrochemistry, reaction mechanisms,.....)Thermodynamics, kinetics, Fabrication processes (lithography, RIE, CVD,...) requiring chemistry in Micro- and Nanoengineering Safety with chemicals (acids, solvents, gases)mittel, Gase

Teaching methods

Blocked "immersion" course in chemistry -

(2021: Zoom-) Lecture with intensive participation of the students.
Case examples will be solved in small groups and together with the lecturere.
A paractical lab course focusing on safety with chemical processes will be offered (2021: if posssible).

Mode of examination

Oral

Additional information


1>>   TISS Registration required

Interested Students please register with TISS.

2>>   Organisational planning meeting

Organisational Meeting on Mo 08.03.2021 - 11:00
https://tuwien.zoom.us/j/95440832237?pwd=M05IMG83aTh4NmRHekFSSG4zRFRMdz09
Meeting-ID: 954 4083 2237 - Passwort: talk4chem
Schnelleinwahl mobil +43720115988,,95440832237#,,#,475059941# Österreich

In this organisational meeting we will discuss when the lecture will take place.

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Mon11:00 - 12:0008.03.2021 (LIVE)Organisational Meeting - Processing Chemistry >> https://tuwien.zoom.us/j/95440832237?pwd=M05IMG83aTh4NmRHekFSSG4zRFRMdz09
Course is held blocked

Examination modalities

Oral exam with sample calculations on chemical processes (stoichiometry, calculating pH value, calculating electrochemical potential)

Course registration

Begin End Deregistration end
01.02.2021 00:00 14.03.2021 23:00 31.03.2021 23:00

Registration modalities

For better planning please register in TISS

Curricula

Study CodeObligationSemesterPrecon.Info
066 508 Microelectronics and Photonics Not specified

Literature

No lecture notes are available.

Previous knowledge

The course will start at high-school level.

Accompanying courses

Language

if required in English