After successful completion of the course, students are able to...

... to understand the course of chemical processes as the interaction of valence electrons.
... apply basic chemical knowledge to processes in semiconductor manufacturing.
... to calculate the necessary mass flows for chemical processes
... adjust buffer solutions with a desired pH value
... to understand redox reactions and exchange reactions as the basis of etching.
... estimate the solubility of substances as a consequence of their protic / aprotic and polar / apolar properties. ... correctly assess the dangers of chemicals in cleanrooms.
Basic knowledge of chemistry (compound classes, stoichiometric composition, acids / bases, RedOx reactions, thermodynamics, reaction kinetics, functionality of organic groups, nomenclature of organic compounds) will be ragained and applied onon examples from microstructuring (etching, lithography, cleaning with solvents, duration of reactions, mixing ratios of 2 reaction partners) .

Concepts in chemistry (pH, electrochemistry, reaction mechanisms,.....)Thermodynamics, kinetics, Fabrication processes (lithography, RIE, CVD,...) requiring chemistry in Micro- and Nanoengineering Safety with chemicals (acids, solvents, gases)mittel, Gase

Blocked "immersion" course in chemistry -

Case examples will be solved in small groups and together with the lecturere.
A paractical lab course focusing on safety with chemical processes will be offered.

Lecture dates in SS2024 - will be decided in the first lecture.

Oral exam with sample calculations on chemical processes (stoichiometry, calculating pH value, calculating electrochemical potential)

For better planning please register in TISS.

The lecture will start at the beginning of the semester and will be held blocked,

The course will start at high-school level.