Mikrowellenmikroskopie für biologische und Halbleiteranwendungen. Details finden in der englischen Beschreibung.
Novel nanoscale microscopy methods have been developed recently and will be reviewed in this lecture, in particularly scanning probe microscopy (aka as atomic force microscopy, AFM) used in semiconductor and bio applications. Focus will be given to high-frequency GHz-AFM for physics, semiconductor materials, and bio-capacitance measurements of cells and bacteria. Eventually this lecture gives insights how semiconductor company failure analysis labs are using the new AFM methods for device investigations, how new 2D functional materials physical properties are studied with AFM, and how the new GHz-AFM methods give novel insights into cells and bacterial. This new microscope technology combines advanced nanotechnology imaging with microwave electronics and 3D modeling, for the study of advanced materials and for the first time also to bio-molecules and cells in living condition.
Nicht erforderlich
