362.151 Semiconductor Process Modeling
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2019W, VU, 2.0h, 3.0EC

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise

Learning outcomes

After successful completion of the course, students are able to...
...describe applications of energetic ion beams in nanofabrication.
...describe models for the characterization of associated phenomena.
...select simulation methods for these phenomena.
...run molecular dynamics simulations and interprete their results.

Subject of course

1. Nanofabrication with ion beams
2. Molecular dynamics
3. Interatomic potentials
4. Mechanical stress
5. Binary collision simulations, coupling with continuum mechanics
6. Multiscale modeling for the simulation of bubble evolution in Si
7. Spontaneous pattern formation by ion bombardment
About half of the course is obtaining hands-on experience with the molecular dynamics simulator LAMMPS.

Teaching methods

Lectures; simulation project using the molecular dynamics simulator LAMMPS.

Mode of examination

Oral

Additional information

The lecture times will be scheduled in the kick-off meeting. The simulation exercises can be scheduled individually.

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Thu13:00 - 14:0003.10.2019Seminarraum 362 - 1 Introduction
Thu11:00 - 12:0010.10.2019Besprechungsraum 362 - 2 Lecture
Thu11:00 - 13:0017.10.2019 - 05.12.2019Besprechungsraum 362 - 2 Lecture
Semiconductor Process Modeling - Single appointments
DayDateTimeLocationDescription
Thu03.10.201913:00 - 14:00Seminarraum 362 - 1 Introduction
Thu10.10.201911:00 - 12:00Besprechungsraum 362 - 2 Lecture
Thu17.10.201911:00 - 13:00Besprechungsraum 362 - 2 Lecture
Thu24.10.201911:00 - 13:00Besprechungsraum 362 - 2 Lecture
Thu31.10.201911:00 - 13:00Besprechungsraum 362 - 2 Lecture
Thu07.11.201911:00 - 13:00Besprechungsraum 362 - 2 Lecture
Thu14.11.201911:00 - 13:00Besprechungsraum 362 - 2 Lecture
Thu21.11.201911:00 - 13:00Besprechungsraum 362 - 2 Lecture
Thu28.11.201911:00 - 13:00Besprechungsraum 362 - 2 Lecture
Thu05.12.201911:00 - 13:00Besprechungsraum 362 - 2 Lecture

Examination modalities

Running the simulation project and presenting its results; oral exam.

Course registration

Begin End Deregistration end
01.09.2019 00:00 03.10.2019 23:59

Curricula

Study CodeSemesterPrecon.Info
066 508 Microelectronics and Photonics

Literature

 

 

Previous knowledge

This course extends the part "Computational Materials Science" of VU 362.152 Materials, processes and technologies of microelectronics.The courses can be taken in arbitrary order.

Language

German