Familiarity with simulation methods of computational materials science and application to nanofabrication with ion beams.

1. Nanofabrication with ion beams
2. Molecular dynamics
3. Interatomic potentials
4. Mechanical stress
5. Binary collision simulations, coupling with continuum mechanics
6. Multiscale modeling for the simulation of bubble evolution in Si
About half of the course is obtaining hands-on experience with the molecular dynamics simulator LAMMPS.

The lecture times will be scheduled in the kick-off meeting. The simulation exercises can be scheduled individually.

Presentation of simulations, oral exam.

This course extends the part "Computational Materials Science" of VU 362.152 Materials, processes and technologies of microelectronics.The courses can be taken in arbitrary order.