After successful completion of the course, students are able to..
.. apply basic principles of chemistry to the processes of microfabrication ... understand the chemical processes for etching, deposition, cleaning in process technology ... independently mix a buffered hydrofluoric acid acid from the individual components ... independently design processes for electrode deposition of copper layers (V, A, duration) ... select gas flows for dry processes according to the reaction stoichiometry ... to work on wet workbenches in the clean room with acids, alkalis and solvents
Concepts in chemistry (pH, electrochemistry, reaction mechanisms,.....)Thermodynamics, kinetics, Fabrication processes (lithography, RIE, CVD,...) requiring chemistry in Micro- and Nanoengineering Safety with chemicals (acids, solvents, gases)mittel, Gase
Lecture supported with ppt slides and blackboard drawingsApplication of chemical principles to questions of everyday lifeApplication of chemical principles to issues of semiconductor technologyJoint development of chemical formulas and reaction equationsJoint development of general chemical and physico-chemical calculations
The lecture "Process Chemistry" will be held as blocked Course in WS2020/21 on the following days: ** ATTENTION Please register for LVA in TISS *** Location: NanoCenter - Building CH Gusshausstrasse 25a Seminar room 2nd floor
Please bring your pocket calculator!
Participation in interactive lessons, pre-calculation of examples on the blackboard, repetition of lessonsFinally oral interview with bi to 3 calculation examples
Please register in TISS for better manegability.
Knowledge of Lithography, CVD, RIE