The aim of this course is to give the students an understanding of chemical processes in micro-and nanotechnology
1) repetition of basic knowledge of chemistry
2) chemical processes in lithography, deposition and etching processes
3) molecular properties and solubility, using examples from the process technology
4) Practical advice on the safe handling of chemicals
This lecture will provide a basic knowledge of chemistry (classes of compounds, stoichiometric composition, acids / bases, Redox reactions, thermodynamics, kinetics, functionality organic groups, nomenclature of organic compounds) and will apply this knowledge on examples from the field of micro- and nanostructuring (lithograph, solvent cleaning, duration of reactions, mixing ratios of 2 reactants).
Concepts in chemistry (pH, electrochemistry, reaction mechanisms,.....)Thermodynamics, kinetics, Fabrication processes (lithography, RIE, CVD,...) requiring chemistry in Micro- and Nanoengineering Safety with chemicals (acids, solvents, gases)mittel, Gase
