The aim of this course is to give the students an understanding of chemical processes in micro-and nanotechnology

1) repetition of basic knowledge of chemistry
2) chemical processes in lithography, deposition and etching processes
3) molecular properties and solubility, using examples from the process technology
4) Practical advice on the safe handling of chemicals

This lecture will provide a basic knowledge of chemistry (classes of compounds, stoichiometric composition, acids / bases, Redox reactions, thermodynamics, kinetics, functionality organic groups, nomenclature of organic compounds)  and will apply this knowledge on examples from the field of micro- and nanostructuring (lithograph, solvent cleaning, duration of reactions, mixing ratios of 2 reactants).

Concepts in chemistry (pH, electrochemistry, reaction mechanisms,.....)Thermodynamics, kinetics, Fabrication processes (lithography, RIE, CVD,...) requiring chemistry in Micro- and Nanoengineering Safety with chemicals (acids, solvents, gases)mittel, Gase

The lecture "Process Chemistry" will be held as Intensice Course in WS2017/18 on the following days:

Mo 02.10     13h Vorbesprechung

Do 05.10     13:30-18h
Fr  06.10     13:30-18h

Mo 09.10     13-18h
Di  10.10     13-18h
Mi 10.10      13-18h
Do 12.10     13:30-18h 
Fr  13.10     13-18h

Mo 16.10     13-18h   (Reservetermin)
Di  17.10     13-18h
Mi  18.10     13-18h   (Reservetermin / erstmöglicher Prüfungstermin)
Do. 19.10     13-18h   (Reservetermin)

Attention:

Di 03. Okt. 2017 – no lecture!
Mi 04. Okt. 2017 – no lecture!
Do 12. Okt. 2017 – dleayed start 13:30 (Nach Vorbesprechung Prof. Hobler)

** ATTENTION NEW: Please register for LVA in TISS ***

For better manageability, login is now requested in the TISS.

Location: Institut f Festkörperelektronik, Floragasse 7,
                Small seminar room 362/2 - 1st floor

Please bring your pocket calculator!
** ATTENTION NEW: We kindly request you to register in TISS ***
For better manageability will now ask you to register in the TISS.

Location: Institut f Festkörperelektronik, Floragasse 7,
              Small Seminar Room 362/2 - 1st floor

Oral exam - Registration for stated dates via TISS.

Additional exam dates maybe arranged upon request - Contact silvia.greil@tuwien.ac.at

Please register in TISS for better manegability.