362.147 Nanostructuring of low domenional systems
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022W, VU, 2.0h, 3.0EC, to be held in blocked form


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to analyse state of the art mechanisms and tools for the fabrication of ultrathin films, nanowires and quantum dots as well as to evaluate the key analytical methods for the characterization of nanostructures and their physical properties and functionalities.

Subject of course

The main content of this course is the knowledge of procedures for the fabrication and characterization of nanoscale low-dimensional systems. Novel materials or devices can take advantage of known physical phenomena that can be improved by nanostructuring, or use entirely new principles.After a presentation of the basic properties of nanostructures and scaling effects follows a description of commonly used techniques for thin film deposition, including thermal evaporation, sputtering and chemical vapor deposition. For the lateral structuring, the latest optical methods, electron beam lithography and Nanoimprint-technology are described. Finally, especially chemical production methods and principles of self - organization will be explained.

Teaching methods

Lecture with digital presentations; elaboration and discussion of exercises

Mode of examination




Course dates

Thu10:00 - 10:3013.10.2022 seminar room CH 0236Vorbesprechung - Anmeldung via email!
Course is held blocked

Examination modalities

oral exam at the end of the term or further along the line on appointment. Estimated duration: 15 minutes


Course registration

Not necessary



Handouts of the presented slides are provided in TISS while the course advances.